ULTRA-HIGH PURITY GASES AND SEMICONDUCTORS
Ultra-high purity ( UHP ) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays .
Manufacturing the silicon wafers needed for semiconductor applications requires the use of ultra-pure gases . Even the smallest impurities can cause major defects in a wafer , leading to costly scrap and waste . Multiple gas purification techniques and other strict procedures are used to ensure that UHP gases are delivered to the manufacturing process . This requires accurate gas monitoring at very low levels of concentration .
Quality control gas measurements must cover all the impurities present – adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process , but if trace-level moisture is missed , contamination will still occur .
A comprehensive solution for all impurities is required , but this can lead to integration issues between hardware and software from different sources .
KEY SOLUTIONS
We provide a single-supplier solution for all UHP measurements in these applications . Our SERVOPRO DF-560E and DF-750 NanoTrace ULTRA oxygen and moisture analyzers offers the lowest detection limits available to the industry , while the multi-gas SERVOPRO NanoChrome ULTRA provides the other trace impurity measurements required . All can be seamlessly integrated into existing systems or supplied as a customer specific turnkey system .
SERVOPRO DF-560E NanoTrace ULTRA
SERVOPRO DF-750 NanoTrace ULTRA
SERVOPRO NanoChrome ULTRA
Find out more online at : servomex . com / uhp
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