ULTRA-HIGH PURITY GASES AND SEMICONDUCTORS
Ultra-high purity( UHP) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays.
Manufacturing the silicon wafers needed for semiconductor applications requires the use of ultra-pure gases. Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. Multiple gas purification techniques and other strict procedures are used to ensure that UHP gases are delivered to the manufacturing process. This requires accurate gas monitoring at very low levels of concentration.
Quality control gas measurements must cover all the impurities present – adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process, but if trace-level moisture is missed, contamination will still occur.
A comprehensive solution for all impurities is required, but this can lead to integration issues between hardware and software from different sources.
KEY SOLUTIONS
We provide a single-supplier solution for all UHP measurements in these applications. Our SERVOPRO DF-560E and DF-750 NanoTrace ULTRA oxygen and moisture analyzers offers the lowest detection limits available to the industry, while the multi-gas SERVOPRO NanoChrome ULTRA provides the other trace impurity measurements required. All can be seamlessly integrated into existing systems or supplied as a customer specific turnkey system.
SERVOPRO DF-560E NanoTrace ULTRA
SERVOPRO DF-750 NanoTrace ULTRA
SERVOPRO NanoChrome ULTRA
Find out more online at: servomex. com / uhp
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