Correlative Nanoscopy of SRAM Devices
neaSCOPE is built on the highest quality AFM platform and can utilize all well-established AFM- based techniques such as KPFM , EFM , etc . A combination of these techniques with cutting-edge state-of-the-art cutting-edge IR & THz imaging and spectroscopy paves the way towards better understanding of semiconductor nanostructures .
Correlative nanoscopy enables allaround nanoscale characterization of functional devices in a single instrument .
SRAM Structure
AFM tip
5 ยต m
Near-Field Correlation Nanoscopy
C . Liewald et al ., Optica . 2018 , 5 , 159 .
IR-neaSCOPE + s and THz imaging of a commercial SRAM device allows for the quantitative free-carrier profiling of functional structures in the whole technologically relevant range of doping concentrations . KPFM and EFM can be used to correlate these profiles with the structures electronic properties , differentiating between p- and n-doped regions .
IR image THz image KPFM image EFM image EFM image
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