Sensor Heads |
M12 / C7.6 |
M15.5 / C1.6 / FLEX |
M12 / C1.6 |
|
Modes of Operation
optics types dimensions mounting connector working environment benefits
|
collimating
Ø 14 mm , length 49.2 mm
metric M12 x 0.5
FC / PC
/ RT / LT / HV / UHV / RAD
long distances and working ranges
|
collimating
Ø 22 mm , length 20.6 mm
metric M15.5 x 0.5
FC / PC
/ RT / LT / HV / UHV / RAD
improved mounting & alignment
|
collimating
Ø 14 mm , length 17.4 mm
metric M12 x 0.5
FC / PC
/ RT / LT / HV / UHV / RAD
medium ranges on plane mirror
|
exemplary applications |
calibration of large-scale machine tools |
long rang angle detection on mirror |
xy wafer stage position control |
Measurement Specifications |
|||
beam diameter |
7.6 mm |
1.6 mm |
1.6 mm |
working range |
up to 5000 mm |
up to 1000 mm |
up to 1000 mm |
alignment tolerance ( mirror ) |
- |
± 0.02 ° |
± 0.02 ° |
lateral alignment tolerance ( retroreflector ) |
± 2 mm |
± 0.5 mm |
± 0.5 mm |
alignment tolerance ( retroreflector ) |
± 15 ° |
± 6 ° |
± 6 ° |