Dynamic Motion Control
Challenge:
Reticle and wafer stages need to perform long stroke movements
of up to several meters that are both fast and precise. Any
measurement device for motion control has to be an order of
magnitude more precise and fast than the process itself.
attocube’s Solution:
attocube´s laser interferometer IDS3010 enables metrology tools
to achieve the required precision at nanometer range over long
distances up to 5 meters with a target velocity of up to 2 m/s.
Axis 2
s 1
Axi
Axis 3
Product:
Displacement Sensor IDS3010
• long distance
• miniaturized sensor
heads (1.2 mm)
• application specific design
Axis 1
Sensor Heads
• travel ranges up to 5 m
• 2 m/s target velocity
• low electric noise level