Motion & Sensing
ultra-precise devices for semiconductor applications
attocube offers ultra precise nanopositioning and interferometric
measurement devices, which are compatible with
extreme environmental conditions such as high vacuum, clean
room environments or elevated operating temperatures.
Years of experience and a dedicated application team guarantees
highest levels of consulting competence, a comprehensive onsite
installation service and excellent after-sales support for
standard products as well as customzied OEM solutions.
Interferometer
Nanopositioners
• vacuum compatibility down to 1 x 10 -10 mbar
• max. operating temperature 150°C
• 0.01 ångstrom resolution
• working distance up to 5 m
• vacuum compatibility down to 5 x 10 -11 mbar
• max. operating temperature 100°C
• motion with nanometer accuracy
• modular positioning system up to 6D