Options |
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environment |
/ LT , / LT / HV , |
/ LT , / LT / HV , |
/ LT , / LT / HV , |
/ LT , / LT / HV , |
/ LT , / LT / HV , |
/ LT / UHV |
/ LT / UHV |
/ LT / UHV |
/ LT / UHV |
/ LT / UHV |
|
encoder |
/ RES |
/ RES |
/ RES |
/ RES |
/ RES |
high load |
/ HL (*) |
--- |
--- |
/ HL (*) |
/ HL (*) |
Dimensions |
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footprint ; height |
30 x 30 ; 10 mm |
30 x 30 ; 12 mm |
30 mm x 30 mm ; 18 mm |
40 x 41.6 ; 11.5 mm |
40 x 45 ; 11.5 mm |
Closed Loop Features |
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resolution / RES |
200 nm |
200 nm |
200 nm |
200 nm |
200 nm |
precision / RES |
1 .. 2 µ mz |
1 .. 2 µ m |
1 .. 2 µ m |
1 .. 2 µ m |
1 .. 2 µ m |
Naming Scheme |
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Type of Positioner |
Direction of Movement |
Dimension |
ANP |
linear nanopositioner |
x |
enabling movement in x or y direction |
3xx |
linear positioners with integrated bearings |
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