Application Book: Heating Solutions for All Industries | Page 73

CONDENSATION PREVENTION GAS DELIVERY SYSTEM HEATING A simple and effective way to prevent condensation Application Elevate and/or maintain gas temperatures to ensure process gas is delivered at the proper temperature. Without proper temperature maintenance, condensation will form within gas lines. This condensation will eventually clog the gas line. The result is forced tool shut-downs and down-time due to maintenance. In addition, if processed gas is delivered to the process chamber either too hot or too cold, this can create further issues, leading to a shut-down or extended down-time. Solutions Custom cloth heaters provide the necessary heat for diameters as small as 1/4 inch (6 mm) while the controller maintains the required temperature (and tolerance). The heaters are all connected and each heater is individually controlled to maximize efficiency and uniformity. All heaters are made to the exact dimensions of the pipes and valves to ensure the consistent heat and long life of the heating system. The System also includes a monitor that shows each heater’s temperature to ensure tolerances are met and downtime is minimized. Lynx TM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TM TM TEMPERATURE CONTROL SYSTEM Lynx TEMPERATURE CONTROL SYSTEM USER INTERFACE 1 MODULE 5 TM TM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE 1 MODULE 5 TM TM LYNX TM TEMPERATURE TEMPERATURE CONTROL SYSTEM CONTROL SYSTEM LYNX TEMPERATURE CONTROL SYSTEM LYNX TEMPERATURE CONTROL SYSTEM LYNX TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TM LYNX TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM LYNX USER INTERFACE 2 MODULE LYNX TEMPERATURE CONTROL SYSTEM 6 TEMPERATURE CONTROL SYSTEM LYNX 1 TM USER INTERFACE 2 MODULE 6 TM TEMPERATURE CONTROL SYSTEM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE MODULE 3 USER INTERFACE MODULE Lynx TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM MODULE TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE 3 Lynx TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE 3 USER INTERFACE USER INTERFACE MODULE 3 Lynx MODULE 4 TM TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE USER INTERFACE MODULE 4 Lynx TM Lynx TM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TM TM TEMPERATURE CONTROL SYSTEM Lynx TEMPERATURE CONTROL SYSTEM USER INTERFACE 1 MODULE 5 TM TM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE 1 MODULE 5 TM TM LYNX TM TEMPERATURE TEMPERATURE CONTROL SYSTEM CONTROL SYSTEM LYNX TEMPERATURE CONTROL SYSTEM LYNX TEMPERATURE CONTROL SYSTEM LYNX TEMPERATURE CONTROL SYSTEM LYNX USER INTERFACE 2 MODULE LYNX TEMPERATURE CONTROL SYSTEM Lynx TEMPERATURE CONTROL SYSTEM 1 MODULE 5 TM TM 2 MODULE 6 TM LYNX TM TEMPERATURE CONTROL SYSTEM MODULE 3 MODULE 1 Lynx 5 TM LYNX LYNX TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM Lynx 2 Lynx 1 TM TEMPERATURE TEMPERATURE CONTROL SYSTEM MODULE 3 USER INTERFACE MODULE 3 TEMPERATURE CONTROL SYSTEM MODULE TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE USER INTERFACE LYNX TEMPERATURE CONTROL SYSTEM USER INTERFACE TM TEMPERATURE CONTROL SYSTEM TM TEMPERATURE TEMPERATURE CONTROL SYSTEM CONTROL SYSTEM LYNX 3 TM TEMPERATURE CONTROL SYSTEM MODULE LYNX TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE USER INTERFACE TM TEMPERATURE CONTROL SYSTEM USER INTERFACE TM TEMPERATURE CONTROL SYSTEM LYNX TEMPERATURE CONTROL SYSTEM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TM 6 TEMPERATURE CONTROL SYSTEM LYNX USER INTERFACE TM USER INTERFACE TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TM LYNX TEMPERATURE CONTROL SYSTEM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TM TEMPERATURE CONTROL SYSTEM 6 MODULE 4 TEMPERATURE CONTROL SYSTEM LYNX TM USER INTERFACE 2 MODULE 6 TM TEMPERATURE CONTROL SYSTEM TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE MODULE 3 USER INTERFACE MODULE Lynx TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM MODULE 1 Lynx USER INTERFACE MODULE 3 Lynx MODULE TM TEMPERATURE CONTROL SYSTEM 4 TM TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE 3 USER INTERFACE Lynx TM TEMPERATURE CONTROL SYSTEM TEMPERATURE CONTROL SYSTEM USER INTERFACE 3 Lynx TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE USER INTERFACE MODULE 4 TM TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE CONTROL SYSTEM Lynx TM TEMPERATURE USER INTERFACE MODULE 4 Benefits • Economically reduces condensation build-up and contamination • Increased productivity • Decreased maintenance • Energy-savings • Safe & cool to the touch (meets SEMI S2 standards) • Long service life: BriskHeat’s typical heating jacket life is 10+ years. No need for aftermarket parts Typical Projects • Small and unique geometries • Abatements • Valves • Tanks, drums, cylinders, and vessels • Laboratory and analytical equipment • Vacuum bake-out • Emission testing • Fluid delivery systems • Gas lines • Exhaust lines • Forelines Industries Semiconductor Flat Panel Display Photovoltaic/Solar Insulated for Superior Thermal Efficiency and Cool-to-the-Touch Safety Durable and Flexible Multi-Stranded Resistance Wire Patented Grounded Heating Element for Your Safety Resistance Wire Spaced Tightly for Optimal Heat Uniformity Types of Users Material Options Designed for Your Environment Including Class 10 Clean Rooms Tool Designers/Engineer Gas Panel Designers Tool Owners Fab Managers Toll Free: 800-848-7673 | Phone: [phone] | BriskHeat.com | Email: [email protected] | Fax: [phone] © BriskHeat Corporation. All Rights Reserved. 20-01 69