A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 8

Unique Kanomax Nebulizer Design
Nanopartricle Nebulizer (NPN, Kanomax 9110)
• Nanoparticle Nebulizer provides online dilution
and sample aerosolization
• Designed to nebulize droplets with a small
peak diameter and reduced concentration of
large droplets
• Software controls dilution ration by varying
sample and dilution water flow
Kanomax FMT Proprietary and
Confidential, slide 8