A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 17

Liquid Nanoparticle Sizer (LNS)
High Sensitivity – Alarm Criteria
• Detect small shifts in individual modes
• Detect changes in ratios of mode concentrations
• Detect changes in mode shape (e.g. increased dimers)
Kanomax FMT Proprietary and
Confidential, slide 17